The effects of non - parallel comb plates on capacitance , sensitivity , electrostatic force and electrostatic spring constant are also discussed 分析了電容式傳感器梳齒的傾斜對(duì)傳感器電容、靈敏度、靜電力和靜電彈簧常數(shù)的影響。
A driving signal with a dc bias voltage and ac voltage is usually necessary for sensing very small capacitance . the reliable operation conditions of the capacitive sensor for foreign acceleration had been researched with the assumption of the parallel comb plates . but the comb plates are actually not parallel for the reason of the drie process 前人在研究外界加速度信號(hào)對(duì)傳感器的作用時(shí),假定驅(qū)動(dòng)信號(hào)產(chǎn)生的靜電力作用在平行梳齒電容極板上,但是,在用drie工藝對(duì)硅進(jìn)行刻蝕時(shí)會(huì)產(chǎn)生側(cè)蝕效應(yīng),從而得到的梳齒電容有一定的傾斜角度。